Within this paper, The brand new lapping slurry and sharpening slurry are launched. As well as the deliquescence diploma of CLBO is fallen to cheapest. A brand new Doing work technology is additionally adopted. Just after rough sprucing, the focus of ultra-precision sharpening slurry is greater appropriately. So does the ultra-precision sprucing speed, and the wiping speed is faster compared to the deliquescence speed. The CLBO crystal surface area roughness can accomplish 1nm and hold the surface area top quality effectively. Obtain by way of your institution
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We summarized The present development status of the substantial-electricity DUV laser equally at the wavelength of FHG of your one-μm laser and at 193 nm. The current enhancement of your stable-condition/fiber laser, together with the nonlinear optical crystals, prompts not just the average electric power but additionally the beam quality (coherence) of your DUV lasers to an unprecedented level.
For instance, The existing concave OC could be replaced by a airplane mirror which could mitigate the power density within the area of M1 as well as the diamond. Furthermore, employing higher hurt threshold coatings for M1 and diamond would also Increase the output ability with no damages. Then, the NIR laser with the 2nd Stokes wavelength may very well be substantial plenty of, together with its fantastic beam excellent, to deliver the ultimate DUV laser at 193 nm by using a superior average electrical power.
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Due to thermal lens influence while in the reliable-state lasers, In case the heating administration is inadequate, it is not uncomplicated to get the reliable-point out laser with a higher energy in addition to a superior beam top quality concurrently. Not long ago, with the event of the thin disk laser and single-crystal fiber (SCF) laser, a significant-electricity laser at the basic wavelength (1 μm) were understood with an excellent beam high-quality Despite having a TEM00 method beam [four,24], which might be superior candidates for the elemental on the DUV laser era. A different applicant for the basic is definitely the large-power fiber laser which might be attained by coherent beam mix with M2 value under 1.
On the other side, the facility scaling with the NIR laser is yet another part to boost the typical electricity from the 193-nm DUV laser. A result of the lack of the significant-electric power amplification Remedy on the NIR laser (for instance at 1553 nm), nonlinear frequency processes such as optical parameter oscillation (OPO) may be applied to make a wavelength converter by shifting the wavelength from one μm to the desired wavelength together with getting relative increased ability [21]. Recently, a diamond Raman laser showed its skill in achieving a substantial power along with a substantial conversion performance at the 1st Stokes of your 1-μm laser [22,23], which implies the chance to become utilized from the 193-nm DUV laser generation due to its significant Raman gain and large frequency change.
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Inside the scientific and industrial applications, the beam good quality on the DUV laser can be an important parameter. Particularly, the beam excellent in the DUV laser dramatically influences the laser machining results. The beam good quality of your DUV laser is determined by that of the basic laser as well as crystal for your frequency conversion. Not long ago, a high-electrical power DUV laser (>10 W) at 258 nm was described by using a beam high quality of M2 < 1.5, which was produced by FHG of the Yb:YAG laser at 1030 nm utilizing the CLBO crystal [13]. This laser would result in an improved laser machining final result in comparison to the earlier DUV lasers with much larger M2.
The pulse length of the second Stokes gentle was shortened to five ns as revealed in Determine 7a, only one-shot photo from the oscilloscope, which can be a standard phenomenon in Raman laser [forty four] although the heartbeat period of the pump laser was 10 ns.
Also, combining the solid-state laser with other nonlinear approach for instance stimulated Raman scattering, NIR lasers can be attained at new wavelengths with significant power and high beam quality, which was analyzed via the evidence-of-theory experiment. This Raman laser scheme provides a new path to the substantial-electrical power DUV laser, Particularly at the more info wavelength of 193 nm.
Tunable ultraviolet laser source based on solid-point out dye laser technologies and CsLiB6O10 harmonic technology
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